MSB Series Medium Frequency Sputtering Power Supply

Kufotokozera Kwachidule:

RHH mndandanda wamagetsi a RF amadalira ukadaulo wokhwima wa RF kuti apatse makasitomala magetsi a RF ndi mphamvu yayikulu, yolondola kwambiri komanso kuyankha mwachangu.Ndi gawo akhoza kukhazikitsidwa, kugunda controllable, ikukonzekera digito ndi ntchito zina.Minda yogwiritsidwa ntchito: mafakitale a photovoltaic, mafakitale owonetsera gulu lathyathyathya, mafakitale a semiconductor, makampani opanga mankhwala, labotale, kafukufuku wasayansi, kupanga, etc.

Njira zogwiritsiridwa ntchito: plasma kupititsa patsogolo mankhwala a vapor deposition (PECVD), plasma etching, kuyeretsa plasma, gwero la ma ion frequency, kufalikira kwa plasma, plasma polymerization sputtering, reactive sputtering, etc.

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Titumizireni imelo

Mawonekedwe

● Masitayelo a njerwa ndi ma rack mount

● Landirani mphamvu zonse za digito, ndi menyu yabwino komanso yolemera

● Kuchunitsa pafupipafupi, kugunda kwa mtima ndi kulumikizitsa kugunda kwa mtima

● Ndi CEX gawo kalunzanitsidwe ntchito

● Chitetezo chokwanira

Tsatanetsatane wa Zamalonda

Zolowetsa	Magetsi olowetsa: AC220V±10% 3ΦAC380V±5%(Zodziwika bwino zitha kusinthidwa makonda)
Zolowetsa	Kulowetsa pafupipafupi: 47 ~ 63Hz
Zotulutsa	Linanena bungwe pafupipafupi: 13.56MHz, 27.12MHz, 40.68MHz
	Kuchulukirachulukira: ± 5%
	Linanena bungwe mphamvu: 1.5 ~ 5kW
	Kuwongolera osiyanasiyana mphamvu linanena bungwe: 1 ~ 100%
	Kusokoneza mphamvu: 50Ω+j0
	Mawonekedwe otulutsa: mtundu wa N
	Zotulutsa: mosalekeza, kugunda
	Kugunda pafupipafupi: 100Hz ~ 100kHz
	Kutalika kwa ntchito: 5-95%
Performance index	Mphamvu yamagetsi: 0.98
	Kukhazikika pafupipafupi: ± 0.005%
	Kuchita bwino: 75% (pakuvotera)
	Harmonic: ＜-45dBc
	Kusokera: ＜-50dBc
	Mawonekedwe owongolera akunja: kuchuluka kwa analogi, kulumikizana ndi kulumikizana
	Njira yolumikizirana: Mawonekedwe olumikizirana a RS485;Optional Etere CAT, Efaneti mafakitale, etc.
Zindikirani: chinthucho chikupitilira kupanga zatsopano ndipo magwiridwe antchito akupitilizabe kuyenda bwino.Malongosoledwe a parameterwa ndi ongotchula chabe.