Kuyika
Pezani zidziwitso ndikufulumizitsa chitukuko.
Advanced Energy imapereka njira zoyendetsera magetsi ndi zowongolera pamapulogalamu ovuta kwambiri oyika mafilimu ndi ma geometri a zida.Kuti muthe kuthana ndi zovuta zosefera, njira zathu zosinthira mphamvu zolondola zimakulolani kuti muwongolere kulondola kwamphamvu, kulondola, kuthamanga, komanso kubwerezabwereza.
Timapereka ma frequency a RF osiyanasiyana, makina amagetsi a DC, milingo yotulutsa mphamvu makonda, matekinoloje ofananira, ndi njira zowunikira kutentha kwa fiber optic zomwe zimakuthandizani kuti muzitha kuyendetsa bwino ntchito ya plasma.Timaphatikizanso Fast DAQ™ ndi kapezedwe kathu ka deta ndi mwayi wopezeka kuti tipereke chidziwitso chazomwe zikuchitika ndikufulumizitsa chitukuko.
Dziwani zambiri za njira zathu zopangira semiconductor kuti mupeze yankho lomwe likugwirizana ndi zosowa zanu.
Vuto Lanu
Kuchokera pamakanema omwe amagwiritsidwa ntchito popanga mawonekedwe ophatikizika amagawo mpaka makanema ochititsa chidwi ndi oteteza (zopangira magetsi), mpaka makanema achitsulo (zolumikizana), njira zanu zoyika zimafunikira kuwongolera kwa mulingo wa atomiki - osati pachinthu chilichonse chokha komanso pagulu lonse.
Kupitilira kapangidwe kake, makanema anu osungidwa ayenera kukhala apamwamba kwambiri.Ayenera kukhala ndi chimango chomwe akufuna, chofanana, ndi makulidwe ofananira, ndikukhala opanda kanthu - ndipo izi ndi kuwonjezera pakupereka zovuta zamakina (zopanikiza ndi zolimba) ndi mphamvu zamagetsi.
Zovutazo zimangowonjezereka.Kuti muthane ndi malire a lithography (sub-1X nm node), njira zodzigwirizanitsa pawiri ndi pawiri zimafuna njira yanu yopangira kuti mupange ndikutulutsanso mawonekedwe pawafa iliyonse.
Yathu Yankho
Mukayika zofunikira kwambiri zoyikapo ndi ma geometri a chipangizocho, mufunika mtsogoleri wodalirika wamsika.
Advanced Energy's RF yoperekera mphamvu komanso ukadaulo wofananira wothamanga kwambiri kumakupatsani mwayi wosintha mwamakonda ndikuwongolera kulondola kwamagetsi, kulondola, kuthamanga, komanso kubwereza kofunikira pamachitidwe onse apamwamba a PECVD ndi PEALD.
Gwiritsani ntchito ukadaulo wathu wa jenereta wa DC kuti mukonze bwino kuyankha kwanu kwa arc, kulondola kwamphamvu, kuthamanga, ndi kubwerezabwereza komwe kumafunikira PVD (sputtering) ndi ma ECD deposition process.
Ubwino
● Kukhazikika kwa plasma ndi kubwereza ndondomeko kumawonjezera zokolola
● Kutumiza kolondola kwa RF ndi DC ndi kuwongolera kwathunthu kwa digito kumathandizira kukhathamiritsa kwadongosolo
● Kuyankha mofulumira kusintha kwa plasma ndi kayendetsedwe ka arc
● Kuthamanga kwapang'onopang'ono ndi kusintha kwafupipafupi kumapangitsa kuti ma etch asankhe bwino
● Thandizo lapadziko lonse lapansi likupezeka kuti liwonetsetse nthawi yowonjezereka komanso ntchito zamalonda